Investigation of a Step-Like Output Energy Decrease Observed in an ArF Excimer Laser for Microlithography
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概要
- 論文の詳細を見る
A step-like decrease of the output energy of an ArF excimer laser for microlithography has been observed during high-repetition rate and high-power operation. The reason for the step-like energy decrease was traced to oxygen by adding 50 ppm of various gas impurities to the laser gas. It is supposed that the energy decrease is caused by laser light absorption due to the oxygen or to some kinds of oxygen compounds because no change was observed in ArF and XeF emission intensities which were monitored as measures of excimer formation, Xe content, and discharge states.
- Japan Society of Applied Physicsの論文
- 2006-10-25
著者
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Uchino Kiichiro
Interdisciplinary Graduate School Of Engineering Science Kyushu University
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Sumitani Akira
Research Division, Komatsu Ltd., 1200 Manda, Hiratsuka, Kanagawa 254-8567, Japan
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Sumitani Akira
Research Division, Komatsu, Ltd., 1200 Manda, Hiratsuka, Kanagawa 254-8567, Japan
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Ishihara Takanobu
Research Division, Komatsu, Ltd., 1200 Manda, Hiratsuka, Kanagawa 254-8567, Japan
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Fukuoka Teruaki
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Ishihara Takanobu
Research Division, Komatsu Ltd., 1200 Manda, Hiratsuka, Kanagawa 254-8567, Japan
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Uchino Kiichiro
Interdisciplinary Graduate School of Engineering and Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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