Modeling of Atomic Processes of Multiple Charged Ions in Plasmas and Its Application to the Study of EUV Light Sources
スポンサーリンク
概要
- 論文の詳細を見る
Atomic processes of multiple-charged ions of high-Z elements from tin to dysprosium are investigated for their application to light sources for extreme-ultra-violet (EUV) lithography. Modeling of these ions in plasmas, including tungsten, which is being considered for use as a divertor and wall material in the fusion devices, is discussed. Atomic spectra become very complex in the case of low-charged ions below Pd-like ions, which calls for a new atomic code for calculating the energy levels and rate coefficients of collisional and radiative processes. The collisional radiative model is validated through code comparison workshop activities. An alternative method for investigating the formation of the non-uniform structure of the plasmas is also presented.
著者
-
FURUKAWA Hiroyuki
Institute for Laser Technology
-
Koike Fumihiro
Physics Department School Of Medicine Kitasato University
-
Nishihara Katsunobu
Institue Of Laser Engineering Osaka University
-
Nishikawa Takeshi
Department Of Applied Quantum And Nuclear Engineering Kyushu University
-
SUNAHARA Atsushi
Institute for Laser Technology
-
SUNAHARA Atsushi
Institute for Laser Technology, Osaka 550-0004, Japan
-
SASAKI Akira
Quantum Beam Science Directorate, Japan Atomic Energy Agency, Kizugawa 619-0215, Japan
-
KOIKE Fumihiro
Physics Laboratory, School of Medicine, Kitasato University, Sagamihara 228-8555, Japan
-
NISHIHARA Katsunobu
Institute of Laser Engineering, Osaka University, Suita 565-0871, Japan
関連論文
- Borrelia burgdorferi Sensu Lato in an Endemic Environment: Wild Sika Deer (Cervus nippon yesoensis) with Infected Ticks and Antibodies
- Genome-wide linkage analysis of type 2 diabetes mellitus reconfirms the susceptibility locus on 11p13-p12 in Japanese
- Observation of Burn and Pusher Regions of Laser-Driven Large-High-Aspect-Ratio Target by α-Particle Imaging
- Analysis and Evaluation of Zig-Zag Slab Laser Amplifier with Optical Diamond Geometry
- Development of HALNA DPSSL for the inertial fusion energy
- Ignition and Burning Calculations in Inertial Confinement Fusion Driven by Light Ion Beam
- Pellet Gain Optimization of Particle Beam Fusion with Au Shell and DT Fuel Target
- Stabilized Hollow Atoms (Ions) Produced with Multiply Charged Ions Passed through Microcapillaries
- Two Secondary Fusion Reactions in Deuterium Fuel as a Diagnostic for Fuel-Pusher Mixing Rate in Inertial Confinement Fusion
- Smoothing of Nonuniformity by X-ray Radiation in Cannonball Target
- Measurement of ICF Plasma Parameters by the Activation Method
- Effects of Multiple Shock and Thermal Conduction on Mixing Layer Evolution in a Stagnating High-Gain Inertial Confinement Fusion Target
- Shock-Wave-Driven Instability at Material Interface in Laser Driven Implosion
- Anomalous Transmission of Laser Light through a Thin Foil Target under 1.06 μm Laser Irradiation
- Deflagration Waves in Laser Compression. I
- 22aWE-2 Generation of One-Cycle Laser Pulses by Use of High Amplitude Plasma Waves
- 26aYF-7 Parametric instabilities of intense lasers from interaction with electron beams
- Molecular Dynamics Study of Structures and Phase Transitions in C_(D_2)Crystals
- Effects of Spectator Electrons on X-Ray Spectra of Impurity Ar in High Denisty Plasmas
- T Cell Response to Borrelia garinii, Borrelia afzelii, and Borrelia japonica in Various Congenic Mouse Strains
- Neutral Debris Mitigation in Laser Produced Extreme Ultraviolet Light Source by the Use of Minimum-Mass Tin Target
- 20pZB-6 Merits of double-cone target for fast ignition
- Levels of Endogenous Interleukin-1, Interleukin-6, and Tumor Necrosis Factor in Congenic Mice Infected with Borrelia garinii
- Theory of Autoionization from Collisionally-Excited Quasi-Molecular States
- A Charge Transfer Mechanism between a Rare Gas Ion and a Diatomic Molecule; the Implication of Inner-Shell Level Mixing
- Irregularity of Autoionizing Rydberg Series in Photoionization Leading to the Si^ 3l States from the Mg-Like Si^ Ions(Atomic and molecular physics)
- Interaction of Ultra Intense Laser with Overdense Plasma
- Stereochemical Behaviors of Cyclohexyl α-Sulfonyl Carbanions
- Novel and Efficient Organic Liquid Electrolytes for Dye-sensitized Solar Cells Based on a Ru(II) Terpyridyl Complex Photosensitizer
- Fine Structures of Laser-Driven Punched-Out Tin Fuels Observed with Extreme Ultraviolet Backlight Imaging
- Restriction Fragment Length Polymorphism in Helicobacter pylori Associated with Gastric Cancer and Duodenal Ulcer
- Deflagration Waves Supported by Thermal Radiation
- Ion Collection by Electromagnetic Force
- Thermonuclear Reaction Wave in High-Density Plasma
- Solitons and Shock Waves in Two-Electron-Temperature Plasmas
- Rarefaction lon Acoustic Solitons in Two-Electron-Temperature Plasma
- Efficient Shell Implosion and Target Design
- Optimization of Shell Implosion Driven by Black Body Radiation
- Multi-component Adsorption Characteristics of Hydrogen Isotopes on Synthetic Zeolite 5A-type at 77.4K
- Fabrication of Low-Density Solid Xenon as Laser-Produced Plasma Extreme Ultraviolet Source
- Scaling Laws of Plasma Ablation by Thermal Radiation
- An intervention study to promote self-improvement of lifestyle in a Japanese community : a new health support program
- Advanced Target Design for the FIREX-I Project
- PARTICLE-PARTICLE PARTICLE-MESH CODE FOR NONIDEAL HIGH DENSITY PLASMA AND ITS APPLICATION ON RAYLEICH-TAYLOR INSTABILITY IN ICF PLASMA
- Laser Production of Extreme Ultraviolet Light Source for the Next Generation Lithography Application
- Mechanical Issues of FIREX Target under Cryogenic Environment
- Modeling of Atomic Processes of Multiple Charged Ions in Plasmas and Its Application to the Study of EUV Light Sources
- Irregularity of Autoionizing Rydberg Series in Photoionization Leading to the Si^ 3l States from the Mg-Like Si^ Ions
- Analysis and Evaluation of Zig-Zag Slab Laser Amplifier with Optical Diamond Geometry
- Extreme Ultraviolet Emission from Laser-Irradiated Low-Density Xe Targets
- Analysis and Evaluation of Laser-Induced Damage of Zig-Zag Slab Laser Amplifier
- A Collective Laser Thomson Scattering System for Diagnostics of Laser-Produced Plasmas for Extreme Ultraviolet Light Sources
- Analysis of Laser Wavelength and Energy Dependences of the Impulse in a Magnetic Thrust Chamber System for a Laser Fusion Rocket
- Target Injection and Engagement for Neutron Generation at 1 Hz
- Properties of Shell-Confined Long Life Plasmas Produced by Lasers
- A Collective Laser Thomson Scattering System for Diagnostics of Laser-Produced Plasmas for Extreme Ultraviolet Light Sources
- Multi-Species Ion Acceleration in Expansion of Finite-Size Plasma Targets
- Material Dependence on Plasma Shielding Induced by Laser Ablation
- Optimization of Extreme Ultraviolet Emission from Laser-Produced Tin Plasmas Based on Radiation Hydrodynamics Simulations
- Experimental Study on Soft X-Ray Radiation Emitted from a Laser-Heated Gold Cavity
- Effects of Relativistic Thermal Velocity Spread of Beam on Electromagnetic Instabilities in Fast Ignition
- Relationship between lifestyle and lifestyle-related factors in a rural-urban population of Japan
- Analysis of Laser Wavelength and Energy Dependences of the Impulse in a Magnetic Thrust Chamber System for a Laser Fusion Rocket