マイクロ流体素子を目的とした金属電極埋め込みPDMS三次元構造体組み立て技術

概要

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Prototype of metal electrodes implanted PDMS microchannel to control the 3-D electric field or precise temperature and new fabrication method were proposed. Our tentative goal is to fabricate a PDMS microchannel which has vertical and horizontal electrodes pairs. Accurate angles of 90 degree between the each electrode are obtained. CYTOP back plates under the metal electrodes were employed due to the residual stress. The CYTOP was worked as the protection layer from photolithography process containing organic solvent. The proposed micro channel consists of the single electrode implanted PDMS substrate and three electrodes of upper and both side implanted cover PDMS structure. We develop novel assembly method starting with three electrodes installed planar PDMS in order to form the 3-D microstructures.
社団法人電気学会の論文