1-5 厚み変化を有する微小振動梁アレイのグレイスケールリソグラフィによる製作(OS2-1 三次元の微細形状創成技術)

概要

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This report describes the fabrication of an acoustic sensor consisting of 64 micro vibration beams with various thicknesses. To control the thickness of micro beams, we employed gray-scale lithography and thick negative PR (photoresist). The negative PR was solidified near the surface by exposure dose control with the degree of gray-scale, resulting in the removal of non-exposed PR near the substrate in the development. Thus the flexible beam-like structure was produced. The gray-scale patterns in the photomask were prepared by pattering an Al thin film with continuous thickness change. The exposure dose through the gray-scale pattern, which relates to the thickness of micro beams, was controlled from 13 to 70%. As the result, the exposed depth of the PR was changed and the thickness of micro beams was varied from 3.02μm to 139μm through 64 beams integrated in 1.5mm×30mm area. Vibration characteristics in air were measured by applying sinusoidal acoustic waves. The results showed that the resonant frequency range was 3.8 times wider than that of uniform thick micro beam array, indicating the successful control of the frequency range by the micro beam thickness.
一般社団法人日本機械学会の論文
2011-09-25