T0502-1-4 圧電性高分子薄膜を用いたMEMS人工内耳基底膜の開発(マイクロ・ナノ領域におけるバイオ・熱流体の融合学術創成(1)バイオMEMS)

概要

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In this paper, the basic characteristics of microfabricated artificial cochlea are investigated in terms of the acoustic/electric conversion. The device has discrete electrodes on the trapezoidal membrane made of piezoelectric material to obtain electric signals generated by the local stress in the membrane. Although the sensitivity of the device can be improved by reducing the thickness of the membrane using the thin film technology, the result shows relatively small electric outputs. The reason for the small output is explored by theoretically estimating the membrane strain. Furthermore, the piezoelectric constant of the device is experimentally measured. Comparing the piezoelectric constant with a value from the literature, it is found that the measured value is extremely larger than that from literature. This result suggests that the process for the polarization should be optimized to improve the sensitivity of the developed artificial cochlea.
社団法人日本機械学会の論文
2009-09-12