425 振動型加速度センサの薄膜梁評価(T09-1 微小機械システムにおけるマイクロ・ナノ力学(1) MEMSにおけるマイクロ・ナノ力学,大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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This report describes an examination of mechanical properties of multi-layer thin-film beam for a MEMS (micro-electromechanical systems) vibratory beam accelerometer (VBA). The target accelerometer has a frame, heavy mass, thick suspension beams and thin vibrating beams made of silicon or some MEMS materials with the size of 2 × 2 mm^2. The VBA measures the acceleration by using resonant frequency change of supporting beams. Since the beam property heavily depends on the performance of VBA, the stress examination method that uses resonance frequency of both-end-support beams with different lengths was used. Finally, the vibratory beam for the miniaturized VBA that contains layers of compressive-TEOS/tensile-TEOS/Pt-Ti/SiN/SiO_2 with suitable tensile stress of 7 MPa and low deflection of 0.75 μm was obtained.
社団法人日本機械学会の論文
2008-08-02