圧電薄膜要素の多段直列接続によるセンサ出力電圧の増倍

概要

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For the multiplication of sensor output voltage, series-connected PZT elements are proposed. The series-connected PZT device is successfully fabricated using dry-etching process of PZT. To validate the multiplication, the output voltages are measured when the device is vibrated. The output voltage of eight series-connected PZT elements roughly corresponds to the sum of the output voltage obtained from each single element. Using circuit simulator, SPICE, the influence of the parasitic capacitances is investigated. The calculated output voltages are in excellent agreement with the measured ones. Reducing the parasitic capacitances properly, the output voltage is linearly multiplied with the number of series-connection.
2010-04-01