2840 マイクロ試験片中の応力集中部が疲労特性へ及ぼす影響(S08-3 微小機械設計・開発のための実験力学の新展開(3),S08 微小機械設計・開発のための実験力学の新展開)

概要

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Micro Electro Mechanical Systems (MEMS) have been applied to various field of devices, for example, micro-photonics devices and micro-medical devices. These MEMS devices include electronic circuits and micro-sized components, which consist of thin films formed on a substrate using the same fabrication techniques for semiconductor devices. The evaluation of mechanical properties for micro-sized material and micro-sized structures is therefore essential to design reliable and durable MEMS devices. During the MEMS fabrication process, we must consider the possibility of introducing sub-micron defects these defects affect on the strength of the final structure. We studied fatigue life by stress concentration for sample of 1/1000th size of traditional sized of specimen. The S-N curves of micro-sized materials are similar for bulk sized one. The scatter of fatigue life of micro-sized material does not exist.
2007-09-07