5502 静電エネルギーと弾性エネルギーを協働させた新規なマイクロアクチュエータの基礎研究(J19-1 マイクロメカトロニクス(1),J19 マイクロメカトロニクス)

概要

論文の詳細を見る
Though some electrostatic microactuators are proposed as a source of drive of the micro electro mechanical systems so far, the ability that the electrostatic force/energy has can't be drawn fully, and only the little power can be taken out in the outside. In this research, the novel drive principle of the microactuator in which electrostatic energy can be taken out in the outside as a mechanical work efficiently by making electrostatic energy collaborate with the elastic energy was devised. It was named Energy Conversion-type Micro Actuator powered by Collaboration of Electrostatic and Elastic energies/forces, EC-Macbee. In order to realize the actuator utilizing this drive principle, necessary mechanism was devised, and the shape and dimension of the non-linear spring of the actuator was designed by FEM analysis.
一般社団法人日本機械学会の論文
2006-09-15