2635 Nd:YAGレーザ第5高調波によるサファイアの表面加工に関する基礎研究(S75-2 先端材料とレーザー加工(2),S75 先端材料とレーザー加工)

概要

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Sapphire is one of desirable sensor materials which is usable in strong acid and/or alkaline environments. As sapphire is a mechanically and chemically difficult-to-maehine material because of its high hardness and chemical stability, laser processing is expected to be a suitable method for precision machining of sapphire. However, infrared lasers like CO_2 laser and YAG laser are not fit for machining thermally friable materials like sapphire. In this study, possibility of thermal-damage free precision shape machining of sapphire was investigated using ultraviolet pulse laser (λ=213nm) from 5^<th> harmonic generation YAG laser. Results obtained are (1) precise rectangular grooves with flat bottom can be machined by stepwise cross scanning of the focused beam, (2) thermal influence is unavoidable even in ultraviolet laser processing, (3) Use of a laser beam of uniform energy distribution and selection of scanning conditions which relieve thermal accumulation is essential for realizing crack-free precision shape machining of sapphire.
社団法人日本機械学会の論文
2005-09-18