ターボ翼の段間隙間が排気性能特性に及ぼす影響(流体工学,流体機械)

概要

論文の詳細を見る
The performance of turbine blades under a medium vacuum was investigated using the Stokes equation in a previous paper, where we could predict the performance of the turbo molecular pump in the pressure range of under 10Pa. For further improvement of the pumping performance of turbine blades under a medium vacuum, experiments were carried out with a pump which has a narrow clearance between the rotor and the stator blade compared with the conventional pump. As a result, we found that the narrow clearance pump had a high performance under a medium vacuum compared with the conventional pump. Therefore, we analyzed the flow field in the turbo molecular pump by the two dimensional Finite Element Method (FEM). In order to examine the influence of the inter-stage clearance, the model was changed from the single stage of turbine blade to the combination of stator blade-rotor blade-stator blade. The comparison between the measurements and the predicted values shows a good agreement under 10Pa.
一般社団法人日本機械学会の論文
2004-02-25