ダブルねじ溝式真空ポンプの試作

概要

論文の詳細を見る
A spiral grooved vacuum pump and a compound molecular pump (the combination of a spiral grooved pump and a turbomolecular pump) are widely used in the thin-film industry for processes such as semiconductor production. Pumping performance is high at pressures below 1000 Pa and low at pressures above 1000 Pa when the clearance between rotor and stator is on the order of 0.1mm, which is the practical value for industrial use. The double spiral grooved vacuum pump is thought to have better pumping performance at such high pressures than the conventional spiral grooved vacuum pump. The aim of this study is to investigate the feasibility of use of the double spiral grooved vacuum pump at pressures above 1000Pa. A double spiral grooved vacuum pump with a rotor of 150mm diameter and 190mm length has been designed and manufactured. Its pumping performance has been tested by experiments. The test results show the improvement in the performance at pressures above 1000Pa compared to the conventional spiral grooved vacuum pump.
社団法人日本機械学会の論文
1997-04-25