Effects of Oxygen Gas Annealing on Electrical Properties and Internal Stress in Indium Tin Oxide Films : Semiconductors
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概要
- 論文の詳細を見る
Indium tin oxide (ITO) films prepared by d.c. magnetron sputtering were annealed in air, vacuum, and oxygen gas atmosphere. The electrical properties and internal stresses of these annealed ITO films were systematically investigated. It was found that, among the above post-annealing treatments, oxygen gas annealing significantly reduced both the resistivity and the internal stress in ITO films at fairly low temperatures of 100-150℃. Resistivities and internal stresses as low as 7 × 10^<-4>Ω cm and 38MPa, respectively, were obtained by annealing in oxygen gas atmosphere at 100℃. It was also revealed that the (111) crystal orientation becomes dominant and that whole grains grow dramatically as a result of post-oxygen-annealing, even at 100℃.
- 社団法人応用物理学会の論文
- 2002-06-01
著者
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Tanaka Akira
Department of Health and Nutrition, College of Human and Environmental Studies, Kanto-Gakuin Univers
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Takayama Shinji
Department Of Systems And Control Engineering Faculty Of Engineering Hosei University
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Takayama Shinji
Department Of Information Networking Osaka University
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Sugawara T
Department Of Systems And Control Engineering Faculty Of Engineering Hosei University
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SUGAWARA Toshifumi
Department of Systems and Control Engineering, Faculty of Engineering, Hosei University
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HIMURO Tokuji
Department of Systems and Control Engineering, Faculty of Engineering, Hosei University
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Himuro Tokuji
Department Of Systems And Control Engineering Faculty Of Engineering Hosei University
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Tanaka Akira
Department Of Diagnostic Pathology Jichi Medical University
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TANAKA Akira
Department of Agricultural Chemistry, Faculty of Agriculture, Tohoku University
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