Complex Flow and Gas-Phase Reactions in a Horizontal Reactor for GaN Metalorganic Vapor Phase Epitaxy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-11-15
著者
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Ohnaka Kiyoshi
Advanced Technology Research Laboratories Matsushita Electric Ind.co. Ltd.
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Ban Yuzaburoh
Advanced Technology Research Laboratories Matsushita Electric Ind.co. Ltd.
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Tsujimura Ayumu
Advanced Technology Research Laboratories Matsushita Electric Ind.co. Ltd.
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Hasegawa Y
Asahi Technical Lab. Co. Shizuoka Jpn
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HARAFUJI Kenji
Advanced Technology Research Laboratories, Matsushita Electric Ind.Co., Ltd.
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HASEGAWA Yoshiaki
Advanced Technology Research Laboratories, Matsushita Electric Ind.Co., Ltd.
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ISHIBASHI Akihiko
Advanced Technology Research Laboratories, Matsushita Electric Ind.Co., Ltd.
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KIDOGUCHI Isao
Advanced Technology Research Laboratories, Matsushita Electric Ind.Co., Ltd.
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Harafuji Kenji
Advanced Technology Research Laboratories Matsushita Electric Ind.co. Ltd.
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Harafuji Kenji
Advanced Technology Research Laboratories Matsushita Electric Ind. Co. Ltd.
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Ishibashi Akihiko
Advanced Technology Research Laboratories Matsushita Electric Ind.co. Ltd.
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Kidoguchi Isao
Advanced Technology Research Laboratories Matsushita Electric Ind.co. Ltd.
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