Study on Deformations and Stress Distributions in Air-Bridged Lateral-Epitaxial-Grown GaN Films

概要

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Two-dimensional deformations and stress distributions in air-bridged lateral-epitaxial-grown GaN (ABLEG-GaN) films have been studied by atomic force microscopy (AFM), two-dimensional finite element method (FEM) analysis, and micro-Raman spectroscopy. The ABLEG-GaN wings slightly tilt, and the direction of the wing tilt changes when the wings coalesce with each other. After coalescence of the wings, the tilt angle decreases with increasing film thickness. By FEM analysis and Raman spectroscopy, it has been revealed that the deformation of the wings originates from the distributions of thermal stress due to large mismatch of the thermal expansion in the GaN seed layer and in the sapphire substrate. The wing deformation is suppressed with increasing film thickness, since the stress distribution becomes more uniform.
2003-10-15