Degradation Mechanisms on Mo or Mo-silicide/n^+ -Si Ohmic Contacts on High Temperature Annealing : LATE NEWS

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1983-02-28

著者

• HIGUCHI Koichi

  Department of Applied Chemistry, Faculty of Engineering, Gunma University

• Higuchi K

  Department Of Applied Chemistry Faculty Of Engineering Gunma University

• OKABAYASHI Hidekazu

  Microelectronics Research Laboratories, NEC Corporation

• Higuchi Kohei

  Microelectronics Research Labs

• KANAMORI Masaru

  Fundamental Research Laboratories, Nippon Electric Co., Ltd.

• Kanamori M

  First Research Dept. Research & Development Div. Nok Corporation

• Kanamori Masaru

  Fundamental Research Laboratories Nec Corporation

• Okabayashi H

  Nec Corp. Ibaraki Jpn

• Okabayashi Hidekazu

  Microelectronics Research Laboratories Nec Corporation

関連論文

• Synthesis, Structure, and Reactions of Octakis(1,1,2-trimethylpropyl)octagermacubane
• Optical Properties of Porous Silicon and Small Silicon Clusters : Search for the Origin of Visible Photoluminescence of Porous Silicon
• InAlAs/InGaAs HEMTs with Uniform Threshold Voltage Fabricated by Selective Wet-Etching Using Adipic Acid
• High-Performance In_Al_As/In_Ga_As High Electron Mobility Transistors on GaAs
• Highly Selective Wet-Etching Using Adipic Acid for Uniform Damage-Free Process of InAlAs/InGaAs HEMTs
• Planarized Via-Hole Filling with Molybdenum by Bias Sputtering : Techniques, Instrumentations and Measurement
• Radiation Damage in MOS Devices Underlying an Electron Beam Annealed SOI Structure : A-6: SILICON CRYSTALS
• A Highly Stable Al-Si Contact to Mo-Silicided Shallow Junctions
• Behaviours of Thermally Induced Microdefects in Heavily Doped Silicon Wafers
• Microdefects Formed in Carbon-Doped CZ Silicon Crystals by Oxygen Precipitation Heat Treatment
• Mechanisms of Mo or Mo-Silicide/n^+ -Si Ohmic Contact Degradation Induced by High-Temperature Annealing
• Degradation Mechanisms on Mo or Mo-silicide/n^+ -Si Ohmic Contacts on High Temperature Annealing : LATE NEWS
• Analysis of the Change in the Carrier Concentration of SnO_2 Thin Film Gas Sensor
• Photoeonductivity of Ultrathin Zinc Oxide Films
• Relationship between Gas Sensitivity and Film Structure of SnO_2 Thin Film Gas Sensor by Sol-Gel Method
• SIMS Study of SiCl_4-Treated SiO_2 Oxide Films
• A Self-Aligned Mo-Silicide Formation

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