Data Processing in the Extraction of Properties from Force Curves for Mapping

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概要

• 論文の詳細を見る

• Properties extracted from force curves obtained by atomic force microscopy (AFM) conducted at various locations on a sample can be mapped to determine their distribution over the sample surface, that is, force curve mapping. Since a huge amount of force curve data must be handled in such mapping, automatic force curve analysis is required. We have developed an algorithm which makes use of a differentiated force curve having peaks at the snap-in and snap-out points of the original force curve and negative values when the AFM tip is in contact with the sample surface. This algorithm was applied to various samples.

• 社団法人応用物理学会の論文
• 1998-06-30

著者

• SUGIMURA Hiroyuki

  Tsukuba Research Lab., Nikon Co.

• NAKAGIRI Nobuyuki

  Tsukuba Research Lab., Nikon Co.

• Kandaka Noriaki

  Tsukuba Research Laboratory Nikon Corporation

• Sugimura H

  Department Of Materials Processing And Engineering Graduate School Of Engineering Nagoya University

• Sugimura Hiroyuki

  Tsukuba Research Laboratory Nikon Corporation:(present Address)graduate School Of Engineering Nagoya

• Sugimura Hiroyuki

  Tsukuba Research Laboratory Nikon Co.:(present Address)depeartrnent Of Materials Processing Enginerr

• Nakagiri Nobuyuki

  Tsukuba Research Laboratory Nikon Corporation

• SUGISAKI Katsumi

  Tsukuba Research Laboratory, Nikon Corporation

• NAKANO Katsushi

  Optomechatronics R&D Department, Nikon Corporation

• Nakano Katsushi

  Optomechatronics R&d Department Nikon Corporation

• Sugisaki Katsumi

  Tsukuba Research Laboratory Nikon Corporation

• Sugimura Hiroyuki

  Department of Materials Science and Engineering, Graduate School of Engineering, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan

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