Vacuum ultraviolet-induced surface modification of cyclo-olefin polymer substrates for photochemical activation bonding
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概要
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The surface of cyclo-olefin polymer (COP) was treated with vacuum ultraviolet (VUV) light at 172 nm wavelength to improve the wettability and adhesion properties. Through VUV treatment in air, the terminal groups of the COP surface were oxidized into oxygen functional groups, containing C–O, C=O, and COO components, making the COP surface hydrophilic. The extent of oxygenation was evaluated by XPS and FTIR-ATR spectra, and it was shown that the surface properties, hydrophilicity, and functionalization were dependent on both VUV irradiation distance and irradiation time, which have an effect on the concentration of oxygen functional groups. VUV-light treatment with a short irradiation distance was more effective in introducing oxygen functional groups.
- 2009-01-01
著者
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Sugimura H
Department Of Materials Processing And Engineering Graduate School Of Engineering Nagoya University
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Sugimura Hiroyuki
Tsukuba Research Laboratory Nikon Co.:(present Address)depeartrnent Of Materials Processing Enginerr
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Sugimura Hiroyuki
Department of Materials Science and Engineering, Graduate School of Engineering, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan
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Murase Kuniaki
Department of Materials Science and Engineering, Kyoto University, Sakyo, Kyoto 606-8501, Japan
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