Effective Reduction of Debris Emitted from a Baser-Produced Plasma

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概要

• 論文の詳細を見る

• In the practical application of laser-produced plasma as a soft X-ray source, the most serious problem is the emission of debris from the plasma. We have quantitatively evaluated the amount of debris, and have described its effective reduction by means of a buffer gas. With a tantalum target material, we substantially reduced the amount of debris by employing a buffer gas combined with protective covering.

• 社団法人応用物理学会の論文
• 1998-02-01

著者

• Kandaka Noriaki

  Tsukuba Research Laboratory Nikon Corporation

• KONDO Hiroyuki

  Tsukuba Research Laboratory, Nikon Corporation

• Kondo Hiroyuki

  Tsukuba Research Laboratory Nikon Corporation

関連論文

• Data Processing in the Extraction of Properties from Force Curves for Mapping
• Effective Reduction of Debris Emitted from a Baser-Produced Plasma

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