Thermal Stability of Pure a-Si Films Prepared by rf-Bias Sputtering
スポンサーリンク
概要
- 論文の詳細を見る
Pure amorphous-silicon (a-Si) films, in which dangling bond terminators such as hydrogen or fluorine are not contained, were prepared using rf-bias sputtering with a magnetron target. The temperature dependence of dark conductivity (σ_d), photoconductivity (Δσ_p), ESR spin density (N_s) and their variation with annealing were studied. It was found that σ_d and Δσ_p were unchanged even after annealing at 500℃, and that the variation of N_s with annealing was similar to that of purely fluorinated a-Si (a-Si:F), and much smaller than that of hydrogenated a-Si (a-Si:H).
- 社団法人応用物理学会の論文
- 1982-02-05
著者
-
SUZUKI Makoto
Faculty of Pharmacy, Meijo University
-
Kakimoto Yoshio
Faculty Of Engineering Kanazawa University
-
Kakimoto Yoshio
Faculty Of Technology Kanazawa University
-
Suzuki Masakuni
Faculty Of Technology Kanazawa University
-
Suzuki Masakuni
Faculty Of Engineering Kanazawa University
-
KANADA Matahiko
Faculty of Technology, Kanazawa University
-
Kanada Matahiko
Faculty Of Technology Kanazawa University
-
Suzuki Makoto
Faculty Of Pharmacy Meijo University
-
Suzuki Makoto
Faculty Of Engineering Niigata University
関連論文
- Total Structures of Colistin Minor Components
- Identification of Lac Dye Components by Electrospray High Performance Liquid Chromatography-Tandem Mass Spectrometry
- Improvement of chemical analysis of antibiotics XXIII : Identification of residual tetracyclines in bovine tissues by electrospray high-performance liquid chromatography-tandem mass spectrometry
- Total Structures and Antimicrobial Activity of Bacitracin Minor Components
- Synthetic Study on 1,3-Polyols. Stereoselective Synthesis of Four Diastereoisomers of 1,2,4,6,8-Pentol Derivatives
- A Coupled Assay System for the Lysis of Cyanobacteria
- Diffusion Profile of Some Metal Ions in Chalcogenide Amorphous Semiconductors
- ON VON NEUMANN REGULARITY, INJECTIVITY AND FLATNESS
- Structure Elucidation of Glykenin, Glycosidic Antibiotics from Basidiomycetes sp. VI. Structure Characterization of the GK Components Using Frit-FAB LC/MS
- PA80 STRUCTURE ELUCIDATION OF GLYCOSIDIC ANTIBIOTICS PRODUCED BY BASIDIOMYCETES
- STUDIES ON THE FATE OF MALOTILATE (NKK-105), A NEW DRUG FOR CHRONIC HEPATITIS AND LIVER CIRRHOSIS, IN RATS
- Clerodane-type Diterpenoids from the Japanese Liverwort Jungermannia infusca (MITT.) STEPH.
- New Sesqui- and Diterpenoids from the Japanese Liverwort Jungermannia infusca (MITT.) STEPH.
- Unsteady, One-Dimensional Flow in Resonance Tube : with Wall Friction, Heat Transfer and Interaction on a Contact Surface
- Uncoupling Mechanism of Glycoside Antibiotic Aculeximycin in Isolated Rat-Liver Mitochondria
- Structural Elucidation of Aculeximycin IV.Absolute Structure of Aculeximycin, Belonging to a New Class of Macrolide Antibiotics
- Structural Elucidation of Aculeximycin III.Planar Structure of Aculeximycin, Belonging to a New Class of Macrolide Antibiotics
- Uncoupling Action of Antibiotic Sporaviridins with Rat-liver Mitochondria
- Nonvolatile Memory Based on Phase Change in Se-Sb-Te Glass
- Pradimicin S, A New Pradimicin Analog III.Application of the Erit-FAB LC/MS Technique to the Elucidation of the Pradimicin S Biosynthetic Pathway
- Reply to "Comments" by M. Kikuchi et al.
- Endotherm in Switch-on Process in Semiconducting Glasses
- Desorption Chemical Ionization Mass Spectra of Underivatized Abscisic Acid-conjugated Metabolites, a Useful Aid for Structural Characterization(Organic Chemistry)
- Formation of Semiconductive Thin Film of Polyacrylonitrite by Vacuum Deposition
- Conductivity Control and Photovoltaic Effects in Chalcogenide Amorphous Semiconductor : II-4: NEW STRUCTURE AND ADVANCED MATERIAL (2)
- Change in the characteristics of amorphous As_2S_3 induced by injected acoustic domains : Physical Acoustics
- Electrical Properties of Oxygenated Amorphous Si Prepared by Ion-Beam Sputtering
- Electrical Properties of Ge_As_x Glasses
- Thermal Effects in a Hartmann-Sprenger Tube
- Comparative Study on Desorption CI and Molecular SIMS for Aminoglycoside Antibiotics Containing Aminoacyl Group (イオン化特集)
- STUDY ON METABOLITES OF TRILOSTANE, AN INHIBITOR OF ADRENAL STEROIDOGENESIS
- Doping Effects of Group-III and -V Element on a-Si Prepared by High Pressure rf Sputtering : II-1: AMORPHOUS FILM PREPARATION AND CHARACTERIZATION (I)
- ESR in As_2S_3 Glasses
- Variation of the ESR Spectrum of Mn^ in Te_As_Ge_Si_x Glasses with x and Annealing
- Amorphous Silicon Films Prepared by rf-Bias Sputtering : III-1: AMORPHOUS FILMS
- Thermal Stability of Pure a-Si Films Prepared by rf-Bias Sputtering
- Effects of rf-Bias on Properties of Sputtered Silicon Films
- An Axisymmetric Contact Problem of an Elastic Half-Space Pressed onto a Rigid Foundation with a Parabolic-Ended Pit and Protrusion
- Studies on Resonance Tube with a Secondary Resonator : (1 st reprot : Unstable Resonant Condition)
- Functional Limitations Predict the Risk of Rehospitalization Among Patients With Chronic Heart Failure
- Ammonium adduct ion in ammonia chemical ionization mass spectrometry. Formation of adduct ion.
- A GENERAL METHOD FOR DETERMINING ABSOLUTE CONFIGURATIONS OF ACYCLIC 1,3-POLYOLS
- Influence of Mn Impurity in Te-As-Ge-Si Glasses
- ESR Studies of Mn^ in Multicomponent Amorphous Semiconductors
- Nonvolatile Memory Based on Phase Change in Se–Sb–Te Glass
- Electrical Properties of Evaporated Polyacrylonitrile Films
- Structural Characterization of Abscisic Acid and Related Metabolites by Chemical Ionization Mass Spectrometry
- Characterization of a New Abscisic Acid-conjugated Metabolite in Crude Plant Extract by Desorption Chemical Ionization and Secondary Ion Mass Spectrometry
- Structure of physalin M isolated from Physalis alkekengi var. francketi.
- Withacoagin, a new withanolide from Withania coagulans roots.
- Composition Dependences of Electrical and Optical Properties of As_xTe_Ge_ and As_Te_Ge_Si_x Glasses
- The crystal and molecular structure of albocycline.
- Uncoupling Mechanism of Glycoside Antibiotic Aculeximycin in Isolated Rat-Liver Mitochondria.