Fabrication and Characterization of Multilayer Zone Plate for Hard X-Rays : Techniques, Instrumentations and Measurement
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概要
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A zone plate for 8 keV X-rays with alternative WSi_2 and C layers was fabricated using a DC planer magnetron sputtering. The zone plate had 20 pairs of a high aspect ratio for hard X-rays. Its thickness was about 50 μm. An X-ray interference pattern through the zone plate was observed using monochromated synchrotron X-rays, and a focusing property of the zone plate was confirmed. The focal length was about 67 mm and the spot size (FWHM) was smaller than 8 μm.
- 社団法人応用物理学会の論文
- 1988-11-20
著者
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Iida Atsuo
Photon Factory, Institute of Materials Structure Science
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Iida Atsuo
Photon Factory Institute Of Materials Structure Science
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Kohra Kazutake
Institute For Super Materials Ulvac Japan Ltd.
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Saitoh Kazuya
Institute For Super Materials Ulvac Japan Ltd.
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INAGAWA Konosuke
Institute for Super Materials, ULVAC JAPAN Ltd.
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HAYASHI Chikara
Institute for Super Materials, ULVAC JAPAN Ltd.
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KATO Norio
Faculty of Science and Technology, Meijo University
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Hayashi Chikara
Institute For Super Materials Ulvac Japan Ltd.
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Kato Norio
Faculty Of Science And Technology Meijo University
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Inagawa Konosuke
Institute For Super Materials Ulvac Japan Ltd.
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