Recrystallization of Ge on SiO_2 Using SrF_2 Seed by Pseudo-Line Electron Beam Annealing
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1987-07-20
著者
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Akiyama Masahiro
Research Laboratory Oki Electric Industry Co. Ltd.
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Akiyama Masahiro
Research And Development Group Oki Electric Industry Co. Ltd.
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Yamagishi Chitake
Central Research Laboratory Nihon Cement Co. Lid.
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KIMURA Tamotsu
Research and Development Group, Oki Electric Industry Co., Ltd.,
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KAMINISHI Katsuzo
Research Laboratory, Oki Electric Industry Co., Ltd.
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Kimura Tamotsu
Research Laboratory Oki Electric Industry Co. Ltd.
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Kimura Tamotsu
Research Amp Development Group Oki Electric Industry Co. Ltd.
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Kaminishi Katsuzo
Research Laboratory Oki Electric Industry Co. Ltd.
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YAMAGISHI Chouho
Research Laboratory, Oki Electric Industry, Co., Ltd.
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Yamagishi Chouho
Research Laboratory Oki Electric Industry Co. Ltd.
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KAMINISHI Katsuzo
Research Laboratory, Oki Electric Industry, Co., Ltd.
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