Anomalous Electrical Characteristics of Epitaxial InN Films Having a High Electron Comcentratiorn at Very Low Temperature
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概要
- 論文の詳細を見る
Epitaxial indium nitride films were grown by metalorganic chemical vapor deposition (MOCVD) using trimeth-ylindium (TMI) and ammonia (NH_3). High electron concentrations of the order of 10^20 to 10^21 cm^-3 were obtained, which are considered to be due to nitrogen vacancies. The temperature dependence of the electrical properties of the epitaxial films were investigated. A sharp decrease of resistivity and an increase of mobility were observed below 4.2 K, and it was found that films with a lower electron concentration showed a sharper thermal slope of resistivity in the electron concentratioru range from 1 × 10^20 to 2 × 10^21 cm^-3. Moreover, a large magnetic field dependence of the differential resistance of the InN film was also seen at 1.4K. X-ray rocking curves and atomic force microscopy (AFM) images were measured for evaluation of the origin of these unusual electrical characteristics.
- 社団法人応用物理学会の論文
- 1997-03-01
著者
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YAMADA Akira
Departments of Immunology, Kurume University School of Medicine
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山田 晃
東京農工大学生物システム応用科学府
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KONAGAI Makoto
Department of Physical Electronics, Tokyo Institute of Technology
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Yamada Akira
Department Of Cardiology Aso-iizuka Hospital
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YAMAMOTO Akio
Department of Applied Chemistry, Graduate School of Science and Engineering, Waseda University
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Konagai Makoto
Department Of Electrical And Electronic Engineering. Tokyo Institute Of Technology
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Miura Naruhisa
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Konagai M
Department Of Physical Electronics Tokyo Institute Of Technology
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Miura N
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Ishii H
Sci. Univ. Tokyo Chiba‐ken Jpn
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Ishii Hideaki
Department Of Pathology Nippon Medical School Musashikosugi Hospital
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MIURA Naruhisa
Department of Electrical and Electronic Engineering, Tokyo Institute of Teclnohogy
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YAMAUCHI Yasuyuki
Department of Ophthalmology, Tokyo Medical University Hospital
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Yamauchi Yasuyuki
Department Of Electrical And Electronics Engineering Fukui University
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Konagai Makoto
Department Of Electrical & Electronic Engineering Tokyo Institute Of Technology
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Yamamoto Akio
Department Of Applied Chemistry Graduate School Of Science And Engineering And Advanced Research Cen
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ISHII Hideaki
Department of Computational Intelligence and Systems Science, Tokyo Institute of Technology
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ISHII Hideaki
Department of Computational Intelligence & Systems Science, Tokyo Institute of Technology
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