Application of Carbonaceous Material for Fabrication of Nano-Wires with a Scanning Electron Microscopy
スポンサーリンク
概要
- 論文の詳細を見る
Electron-beam-induced deposition (EBID) was studied for the fabrication of nanometer scale wire features (nano-wires). Residual hydrocarbon molecules in a scanning electron microscope chamber was used as a precursor and the writing conditions of carbonaceous wires was extensively investigated. A high acceleration voltage and high magnification led to narrower growth of a carbon wire and a wire width of 30 nm was obtained under optimized conditions, For fabrication of conducting nano-wires, the carbon wire and a spin-coated SiO_2 were employed as a dry etching mask and a nano-wire of heavily phosphorous-doped St with a 60 nm width was successfully fabricated by this novel technique.
- 社団法人応用物理学会の論文
- 1996-08-15
著者
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YAMADA Akira
Departments of Immunology, Kurume University School of Medicine
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山田 晃
東京農工大学生物システム応用科学府
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KONAGAI Makoto
Department of Physical Electronics, Tokyo Institute of Technology
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Yamada Akira
Department Of Cardiology Aso-iizuka Hospital
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Konagai Makoto
Department Of Electrical And Electronic Engineering. Tokyo Institute Of Technology
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Miura Naruhisa
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Konagai M
Department Of Physical Electronics Tokyo Institute Of Technology
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Miura N
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Ishii H
Sci. Univ. Tokyo Chiba‐ken Jpn
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Ishii Hideaki
Department Of Pathology Nippon Medical School Musashikosugi Hospital
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MIURA Naruhisa
Department of Electrical and Electronic Engineering, Tokyo Institute of Teclnohogy
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Konagai Makoto
Department Of Electrical & Electronic Engineering Tokyo Institute Of Technology
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ISHII Hideaki
Department of Computational Intelligence and Systems Science, Tokyo Institute of Technology
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ISHII Hideaki
Department of Computational Intelligence & Systems Science, Tokyo Institute of Technology
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