Transmission Electron Microscopic Observation of Microdefectsin Zn^+ : Implanted GaAs
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1985-10-20
著者
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Kawado Seiji
Sony Corporation Research Center
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MORITA Etsuo
Sony Corporation Research Center
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KASAHARA Jiro
Sony Corporation Research Center
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Kasahara Jiro
Sony Corporation Materials Laboratory
関連論文
- Measurement of Local Lattice Distortion in Silicon by Imaging-Plate Plane-Wave X-Ray Topography with Image Magnification
- Time-Resolved X-Ray Diffraction Measurement of Silicon Surface during Laser Irradiation under Grazing-Incidence Conditions
- Novel Analysis System of Imaging-Plate Plane-Wave X-Ray Topography for Characterizing Lattice Distortion in Silicon
- Time-Resolved X-Ray Diffraction from a Silicon Crystal Irradiated by a Q-Switched Nd:YAG Laser : Condensed Matter
- Observation of Lattice Defects in Silicon by Scanning Electron Microscopy Utilizing Beam Induced Current Generated in Schottky Barriers
- Field Ion-Scanning Tunneling Microscope Equipped with Molecular Beam Epitaxy and Its Application to Study Semiconductor Surface Structure
- Formation of p^+-layer in GaAs by dual implantation of Zn and As
- Redistrubution of Zn Implanted into GaAs
- Highly Reliable Bottom-Contact Pentacene TFTs with a Poly(p-chloroxylylene) Layer Selectively Grown on a Gate-Insulator
- Transmission Electron Microscopic Observation of Microdefectsin Zn^+ : Implanted GaAs
- Knoop Hardness of Phosphorus-Diffused Silicon Single Crystals
- X-Ray Observation of Dislocations in Mn-Zn Ferrite
- Influence of Preoxidation Annealing on Stacking Fault Generation Due to Mechanical Damage on Silicon Surfaces
- Formation of Gallium Nitride at the Interface between Silicon Nitride Encapsulant and Ion Implanted GaAs
- X-Ray Topographic Images of Oxidation-Induced Frank Sessile Dislocation Loops in Thin Silicon
- Structural Change of Oxidation-Induced Frank Sessile Dislocation Loops in Silicon
- Scanning Electron Microscopic Observation of Oxidation-Induced Stacking Faults in Silicon
- X-ray Observation of Conversion of Faulted Loops to Prismatic Loops in Silicon
- Control of Oxidation-Induced Stacking Faults in Silicon by Chlorine Implantation
- Threshold Voltage Uniformity of GaAs-FETs on Ingot-Annealed Substrates
- DLTS Study of Cr Trap Density in Thermally Converted Semi-Insulating GaAs
- Semi-Sealing Capless Anneal of GaAs
- Redistribution of Cr in Capless-Annealed GaAs under Arsenic Pressure
- X-Ray Observation of Magnetic Domain in Mn-Ferrite