Mass Spectrometry Ion Sampling on the Positive Column DC Discharge Plasmas
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概要
- 論文の詳細を見る
The quadrupole mass filter (QMF) calibration constant of ion sampling from the positive column of a dc discharge plasma was studied as a function of various experimental parameters such as the gas pressure, the diameter of the sampling orifice, and the nature of the gas discharge. The most important factor included in the calibration constant, the sampled ion beam attenuation from the orifice to the mass filter, is explained very satisfactorily by the Coburn-Kay model. Some experimental data are reported on the ion sampling calibration constant of neon discharges at pressures up to 8 Torr and a discharge current of between 20 mA and 80 mA. Measurements in argon and neon discharges illustrate that the transition from the Knudsen region to the near-Knudsen region is nearly independent of the type of gas.
- 社団法人応用物理学会の論文
- 1983-10-20
著者
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HATTORI Shuzo
Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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Hattori Shuzo
Department Of Electronics Faculty Of Engineering Nagoya University
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EL-KELISH Salah
Department of Electronics, Faculty of Engineering, Nagoya University
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El-kelish Salah
Department Of Electronics Faculty Of Engineering Nagoya University
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