Ion Sampling Study in Gaseous Plasmas Using a Simple QMF

概要

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A simply-constructed Quadrupole Mass Filter (QMF) was used to study the plasma ionic constituents in the positive column of a dc discharge. The instrumental calibration constant, the ratio of the detected ion current I_1 to the electron density n_e produced at the positive column source, was measured as a function of the discharge pressure and current. The electron density n_e was measured by the floating double-probe method. Measurements in the low-pressure region of the discharge below 2 Torr showed an approximate proportionality between I_1 and n_e, except for a slight dependence on discharge current and pressure. Some experimental data are reported on the ion current ratio measurements I(Ar_2^+)/I(Ar+) for argon discharge at pressures varying from 0.4 to 9 Torr and for a discharge current density of 220 mA/cm^2. The ion ratios obtained here are compared with those obtained by other authors.
社団法人応用物理学会の論文
1983-02-20