Characterization of Czochralski Silicon Wafers Grown at a Low Growth Rate by Photoluminescence Spectroscopy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-01-15
著者
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KATODA Takashi
Department of Electronic and Photonic Systems Engineering, Kochi University of Technology
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Hamada Mototsugu
Department Of Electronic Engineering Faculty Of Engineering The University Of Tokyo
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Katoda T
Kochi Univ. Technol. Kochi Jpn
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Katoda Takashi
Department Of Electronic And Photonic Systems Engineering Kochi University Of Technology
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Katoda Takashi
Department of Electronic and Photonic System Engineering, Kochi University of Technology, 185 Tosayamada-cho, Kami, Kochi 782-8502, Japan
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