Damage in the Surface Region of Silicon Produced by Sputter-Etching
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1974-03-05
著者
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YAMAMOTO Yasuhiro
School of Pharmaceutical Sciences, Toho University
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Itoh Tadatsugu
School Of Science And Engineering Waseda University
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Yamamoto Yasuhiro
School Of Science And Engineering Waseda University
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SHINADA Kazuyoshi
School of Science and Engineering, Waseda University
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YADA Kazuo
Toshiba Research and Development Center. Tokyo Shibaura Electric Co. Ltd.
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Shinada Kazuyoshi
School Of Science And Engineering Waseda University
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