Problem in Thin Film Backscattering Spectrum Edge Determination

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1976-11-05

著者

• YAMAMOTO Yasuhiro

  School of Pharmaceutical Sciences, Toho University

• Ito Tadatsugu

  School Of Science And Engineering Waseda University

• Ito Tetsuya

  School Of Science And Engineering Waseda University

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• Automatic Angular Distribution Measuring System in Rutherford Backscattering Analysis
• Problem in Thin Film Backscattering Spectrum Edge Determination
• Damage in the Surface Region of Silicon Produced by Sputter-Etching

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