Generation and Detection of Elastic Surface Waves with ZnO Film Transducers
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概要
- 論文の詳細を見る
Effects of various configurations of interdigital electrodes on the generation and detection of elastic surface waves are studied by using sputtered ZnO transducers. It is found that the insertion loss of ZnO film transducers decreases considerably when a metal film is plated between a substrate and a ZnO film on which interdigital electrodes are deposited.
- 社団法人応用物理学会の論文
- 1971-08-05
著者
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Inaba Ritsuo
Electrotechnical Laboratory
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KAJIMURA Koji
Electrotechnical Laboratory, Tsukuba Research Center
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MIKOSHIBA Nobuo
Electrotechnical Laboratory
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Kajimura Koji
Electrotechnical Laboratory
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Mikoshiba Nobuo
Electrotechnica Laboratory
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