Fabrication of low loss transmission line with Surface micromachining technology(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

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In this paper, we fabricated the low-loss transmission line of air-bridge form using the surface micromachining (SMM). Proposed structure used the polyimide dielectric posts between the signal line and ground to obtain the low-loss and the wide characteristic impedance range in millimeter waves. The whole length of fabricated transmission line is 2 mm, and post size is 10×10 μm^2, and we fabricated the signal line with 7μm and 10 μm height to compare the characteristics by signal line height change from substrate. From the fabricated DAML's results of measurements, we obtained 2.2 dB/cm attenuation in the 7μm height DAML and 1.5 dB/cm attenuation in the 10 μm height DAML up to 50 GHz. Then the change of characteristic impedance showed 100-20 ohms, 115 - 27 ohm, respectively.
社団法人電子情報通信学会の論文
2003-06-23