Fabrication of low loss transmission line with Surface micromachining technology (AWAD2003 (Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices))

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In this paper, we fabricated the low-loss transmission line of air-bridge form using the surface micromachining (SMM). Proposed structure used the polyimide dielectric posts between the signal line and ground to obtain the low-loss and the wide characteristic impedance range in millimeter waves. The whole length of fabricated transmission line is 2 mm, and post size is 10 × 10 μm^2, and we fabricated the signal line with 7 μm and 10 μm height to compare the characteristics by signal line height change from substrate. From the fabricated DAML's results of measurements, we obtained 2.2 dB/cm attenuation in the 7 μm height DAML and 1.5 dB/cm attenuation in the 10 μm height DAML up to 50 GHz. Then the change of characteristic impedance showed 100-20 ohms, 115-27 ohm, respectively.
社団法人電子情報通信学会の論文
2003-06-23