A System for 3D Simulation of Complex Si and Heterostructure Devices (Special Issue on 1993 VLSI Process and Device Modeling Workshop (VPAD93))

概要

論文の詳細を見る
A software package has been developed for simulating complex silicon and heterostructure devices in 3D. Device geometries are input with a mouse-driven geometric modeler, thus simplifying the definition of complex 3D shapes. Single components of the device are assembled through boolean operations. Tetrahedra are used for grid generation, since any plane-faced geometry can be tessellated with tetrahedra, and point densities can be adapted locally. The use of a novel octree-like data structure leads to oriented grids where desirable. Bad angles that prevent the convergence of the control volume integration scheme are eliminated mostly through topological transformations, thus avoiding the insertion of many redundant grid points. The discretized drift-diffusion equations are solved with an iterative method, using either a decoupled (or Gummel) scheme, or a fully coupled Newton scheme. Alternatively, generated grids can be submitted to a Laplace solver in order to calculate wire capacitances and resistances. Several examples of results illustrate the flexibility and effectiveness of this approach.
社団法人電子情報通信学会の論文
1994-02-25