Fine Surface Finishing Method for 3-Dimensional Micro Structures (Special Issue on Micromachine Technology)

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概要

• 論文の詳細を見る

• A new finishing method using an advanced ECM assisted by fine abrasive grains was developed, in order to smooth and finish surfaces of 3-dimensional micro components used in micromachines. With the method, a fine surface of selected micro-area, which is not obtained by micro-EDM nor conventional ECM, was obtained in a few minutes. We also developed an advanced machine which has a performance of making 3-D complicated micro structures with fine surfaces by the combination of micro-EDM and the developed finishing method. The performance is achieved by a sequential process from the micro-EDM to the finishing without handling workpiece. Using the new machine, we obtained a high precision shaft with a mirror-like surface. The result is satisfactory to apply the method to making a cylindrical substrate for a rotor of a micro wobble motor. The machining process combined the micro-EDM and the new finishing will be applied to producing micro components such as mechanical parts, mirrors and molding dies.

• 社団法人電子情報通信学会の論文
• 1997-02-25

著者

• SATO Takashi

  Kyoto University

• Sakata Tsuyoshi

  Fujitsu Microelectronics Ltd.

• Sato T

  Photonic Lattice Inc.:niche Tohoku University

• Takahata K

  Ntt Photonics Labs. Ntt Corporation

• TAKAHATA Kenichi

  Opto-Electro Mechanics Research Laboratory, Matsushita Research Institute Tokyo, Inc.

• AOKI Shinichiro

  Opto-Electro Mechanics Research Laboratory, Matsushita Research Institute Tokyo, Inc.

• SATO Takeo

  Opto-Electro Mechanics Research Laboratory, Matsushita Research Institute Tokyo, Inc.

• Aoki Shinichiro

  Opto-electro Mechanics Research Laboratory Matsushita Research Institute Tokyo Inc.

• Sato Takashi

  Institute Of Physics And Tsukuba Research Center For Interdisciplinary Materials Science University

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