LiNbO_3基板弾性表面波特性のカット依存性

概要

論文の詳細を見る
It is an essential feature in surface acoustic wave (SAW) device applications to know the propagation characteristics. In this paper, the characteristics of Rayleigh waves on LiNbO_3 are computed by changing arbitrarily both cut and propagation direction. The results are shown in a set of maps of equal velocity, equal power flow angle, equal electro-mechanical coupling constant and equal temperature coefficient of delay time. From theses maps it is possible to know the characteristics of SAW propagation for every substrate with arbitrary cut and propagation direction. Therefore these maps are very useful for the selection of new substrate of LiNbO_3. According to the computed results, the maximum value of electro-mechanical coupling constant K^2 is 5. 68% and temperature coefficient of delay time is greater than 70ppm/℃ for every cut.
社団法人日本音響学会の論文
1980-07-01