温度特性の優れた弾性表面波用水晶の新カット基板の探索

概要

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The temperature stability is a very important factor in Surface Acoustic Wave (SAW) devices. At present, ST-cut quartz is widely used to realize a zero temperature coefficient, but it is not sufficient for recent SAW devices. Other more stable cuts should therefore be found. In this paper a new cut of quartz with zero slope temperature is discovered theoretically and experimentally. In the theory a temperature dependence of time delay is calculated and a family of curves giving Euler's angles for zero slope temperature is obtained when the temperature is -10, 20, 50 and 80 degree. Then a new cut with more stable temperature dependence is selected. The new cut of plate is demonstrated experimentally from the theoretical prediction. The resulting temperature dependence is better than the St-cut and the fraction time delay is less than 10 ppm in the temperature range from 0 to 55 degrees. This new cut of quartz must be useful for may SAW devices.
社団法人日本音響学会の論文
1982-09-01