Modeling of Two-Dimensional Radio-Frequency methane Glow Discharge in Cylindrical Geometry
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概要
- 論文の詳細を見る
A self-consistent two-dimensional three moment radio-frequency glow discharge model has been developed for methane feed gas using a fluid model to study the charged species dynamics and its effects on deposition in a polyatomic gas discharge. Swarm data as a function of electron energy are provided as input to the model. The discharge is electropositive since positive ion density is more than negative ion density. The importance of two-dimensional modeling has been emphasized by comparing the plasma variables with those of a one-dimensional model. The model predicts both the radial and axial variations of species densities, electron energy and electric field. The off-axis maxima in species densities, typical for two-dimensional discharge, can be observed. The asymmetry of the discharge generates a self dc bias that has been predicted by a trial and error method. The model also calculates the radial variations of species fluxes to the cathode that are important to predict the film deposition.
- 社団法人日本機械学会の論文
- 1998-05-15
著者
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LEE Young
Department of Food Science and Nutrition, Pusan National University
-
Bera Kallol
Department Of Mechanical Engineering And Mechanics Drexel University
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FAROUK Bakhtier
Department of Mechanical Engineering and Mechanics, Drexel University
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Farouk Bakhtier
Department Of Mechanical Engineering And Mechanics Drexel University
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Lee Young
Department Of Aerospace Information Engineering The Konkuk University
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