F156 CZ 法単結晶引き上げ時の酸化物単結晶温度分布計算

概要

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Temperature distributions in a GSO crystal during CZ single-crystal growth were numerically investigated by thermal radiation heat transfer analysis with 2D axisymmetric conduction. As properties of the GSO crystal changed from transparent to opaque at a wavelength of 4.5μm, the band-energy approximation was used. We assumed that melt was opaque and the temperature was constant. Longitude and radial temperature distributions in the crystal were calculated by changing parameters of the apparatus. Radial temperature distribution was alwas large at the top of the Crystal. There are optimum height, diameter and temperature of the crucible to reduce radial temperature distribution in the crystal in the crucible. Radial temperature distribution increased when the diameter of the crystal was large.
社団法人日本機械学会の論文
2002-11-06