チョクラルスキー法酸化物単結晶引き上げ時の温度分布計算(熱工学,内燃機関,動力など)

概要

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Temperature distributions in a GSO crystal during Czochralski single-crystal growth were numerically investigated by 2D axisymmetric thermal radiation heat transfer analysis with conduction. As properties of the GSO crystal changed from transparent to opaque at a wavelength of 4.5 nm, the band-energy approximation was used. We assumed that the melt was opaque with a constant temperature. Longitude and radial temperature distributions in the crystal were calculated by changing parameters of the apparatus. Radial temperature distribution was always large at the top of the crystal. There are the optimum height, diameter and temperature of the crucible to reduce radial temperature distribution in the crystal in the crucible. Low thermal conductivity of insulator and top lid of the insulator are effective to reduce radial temperature distribution at the top of the crystal. Radial temperature distribution increased when the diameter of the crystal was large.
社団法人日本機械学会の論文
2003-07-25