F202 高周波磁場による自然対流の抑制(オーガナイズドセッション17 : 材料およびデバイス製造の熱工学)

概要

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Melt convection during the crystal growth process seriously affects the crystal quality. Therefore, the control of melt convection becomes important. For this purpose, we considered the utilization of high frequency magnetic field to suppress the natural convection in the Si melt during the radiatively heating FZ process on the earth, where the buoyancy and Marangoni forces are acting simultaneously, and numerically investigated the effect. The result reveals that the high frequency magnetic field has the damping effect on the melt natural convection, and is useful to control the natural convection, where the intensity of upper convection cell is slightly increased due to the buoyancy force compared with the pure Marangoni convection.
一般社団法人日本機械学会の論文
2001-11-03