CZシリコン融液内自然対流に対する高周波磁場の影響(熱工学,内燃機関,動力など)

概要

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Effect of high frequency magnetic field on the natural convection in the Czochralski (CZ) silicon melt has been investigated numerically. The purpose of the study is to clarify the applicability of high frequency magnetic field for the control of the natural convection in the CZ silicon melt to produce high quality silicon single crystals. The numerically obtained results reveal that the melt natural convection is strongly affected by the high frequency magnetic field if the induction coil is placed at the slightly above the melt free surface. Although the convection structure is depend on the applied induction coil current and frequency, the high frequency magnetic field induces the opposite direction convection below the crystal compared with the natural convection if the adequate induction coil current and frequency is applied on the induction coil. The temperature field below the crystal is flattened due to the electromagnetically induced convection.
一般社団法人日本機械学会の論文
2003-05-25