白金で修飾したAl_2O_3/SnO_2多層膜のガスセンサー特性

概要

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Al_2O_3/SnO_2 multilayered films were fabricated via the sol-gel method using ^iPrOH solutions of Sn(^iQPr)_4 and Al (^iOPr)_3, which were prepared by adding triethanolamine. Coating was accomplished by a dip-coating procedure. Doping with Pt and surface modification of SnO_2 films by Pt were also performed. The Al_2O_3 layer was coated on the SnO_2 film to fabricate Al_2O_3/SnO_2 multilayered films. The SnO_2 film, after five depositions and firing at 600℃, was about 400 nm in thickness and 20-30 nm in grain size. The Al_2O_3/SnO_2 multilayered gas sensor exhibited higher gas sensitivity than the monolithic SnO_2 film, particularly to CH_4. The increase in the sensitivity was due to the high resistivity in air atmosphere when the Al_2O_3 layer was overcoated. The doping of Pt into the SnO_2 film negligibly affected the sensitivity, except that to CH_4, though SnO_2 film sur face-modified with Pt film exhibited high gas sensitivity even at low temperature. The multilayered film of Al_2O_3/Pt/SnO_2 exhibited high sensitivity to CH_4 and fast changing speed.
社団法人日本セラミックス協会の論文
2002-10-01