熱電式水素センサの新しい構造デザインによる広い検出濃度領域

概要

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Thermoelectric hydrogen sensor (THS) is a promising candidate for a hydrogen leak alarm system because of its unique, reliable working principle and its performance has been improved by fabricating it as a micro-device. In this study, we have investigated the performance of a micro-THS with new design of 4×4mm^2 chip. The integration of a thermoelectric thin film of B-dope SiGe and a ceramic catalyst of Pt 40 mass% loaded alumina into a micro hot-plate on a thin membrane, has improved its performance. We have demonstrated that the micro-THS detected the wide range of H_2 concentration in air from low as 0.5 ppm to high as 5 vol%.
社団法人日本セラミックス協会の論文
2006-10-01