熱分解法による抵抗薄膜とその原材料の熱分解特性

概要

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In order to develop an economical production process of stable and uniform thin film resistors, the RuO_2-based thin films prepared by MOD were studied with focussing on the three major factors to affect the properties of the RuO_2 resistors: the kinds of the substrate, suitable resin component for screen printing and effect of the cleanness of the substrate. As a result, it was found that (1) the films formed on amorphous glazed alumina plate were much more thermally stable than those on crystalline glazed plate, (2) rosin type paste with higher temperature thermal decomposition property gave better resistance uniformity than cellulose type paste, and (3) cleaning the substrate surface with fumed nitric acid was indispensable for making realization of the uniformity and reproducibility in the resistance of RuO_2 dot array. Studies on the properties of sputtered RuO_2 films were also made for comparison with the properties of MOD RuO_2 films.
社団法人日本セラミックス協会の論文
1996-09-01