反応性熱プラズマ内での酸窒化アルミニウムの焼結

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The synthesis and sintering behavior of AlON from a mixture of Al_2O_3-AlN by the reactive plasma treatment were investigated. AIN, Al_2O_3, Y_2O_3 and CeO_2 powders were used as starting materials. These powders were mixed and formed into a pellet. The pellet was sintered in the reactive Ar-N_2 plasma generated inductively in a quartz tube by using an r. f. generator (4 MHz, 5 kW or 10 kW) and a work coil. High AION content sample was obtained by 30 min sintering of mixture with a composition which corresponds to the AION single phase region, in the sintered body near the r.f. coil for a short time duration (5 min). When a large amount of Al_2O_3 was added into the starting powder, a dense sample was obtained. At a low plate output (5.5 kW) , the density decreased with increase in distance between the sample and the lower end of the work coil. At a high plate output (7.7 kW) of the r.f. generator, the density of the sintered sample near the coil decreased, because the plasma power was too high to sinter the sample without causing decomposition. At a higher plate output (10.0 kW), shimilar tendency was observed in the sintered sample near the coil as to various sintering durations. At a low position which was far from the coil, the density reached a maximum value in 3 min (10.0 cm) and 20 min (13.5 cm) sintering. Therefore it seemed that the optimum sample position was existed. The linear shrinkage also increased to a maximum value at this position. From the SEM observation, the grain growth was observed after 30 mill sintering, but the grain size was several micrometer smaller than that by the usual sintering method. The density of the sintered sample using Y_2O_3 was higher than that using CeO_2 or without any additives. Nitrogen or hydrogen addition to Ar plasma was effective to promote sintering, because the enthalpy of plasma and heat transfer from plasma to the sample were remarkably in creased.
1996-07-01

反応性熱プラズマ内での酸窒化アルミニウムの焼結

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