イオンプレーティングC_<60>フラーレン薄膜の摩擦特性と膜強度

概要

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C_<60>-based thin films were prepared on Si(111)and quartz substrates as well as on a stainless steel rod(frictional specimen)by vacuum evaporation and rf ion plating methods. Their structures and friction properties were elucidated by Raman and UV-VIS absorption spectra and by a pendulum type friction machine, respectively. The ion-plated films were composed of C_<60> and its decomposition product(amorphous carbon : a-C)and the C_<60>/a-C ratio could be controlled by the rf power applied to generate the plasma. An ion-plated film containing C_<60> was especially useful for preserving a low friction for a long time.
社団法人日本セラミックス協会の論文
1997-09-01