Walking Driveによる精密送り機構の開発(第3報) : デュアルモード超精密高速位置決めシステムの開発

概要

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The present paper presents a new method to realize ultraprecision high-speed positioning by switching two feed drive methods, which are walking drive proposed by the authors in the previous report and 'running drive' utilizing elliptical vibration. It is clarified that the walking drive is suitable for ultraprecision positioning and smooth and slow motion over long stroke but not advantageous for high speed motion. The walking drive positioner can also be driven at high speed by the running drive without changing any hardware. A new dual-mode feed drive system is developed in order to increase the maximum feed velocity by applying the running drive far from the desired position and switching to the walking drive near the desired position. It is confirmed experimentally that ultraprecision high-speed positioning with a settling time of about 400 ms for a step positioning of 10 mm and an allowable error of 5 nm is achieved by employing the dual-mode positioning system.
公益社団法人精密工学会の論文
2001-07-05