静圧テーブルの運動誤差解析と高精度化(第1報) : 伝達関数を利用した誤差解析と修正磨法の提案

概要

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Motion errors of an ultraprecision hydrostatic feed table are analyzed in the present research by developing a new model utilizing a transfer function. Relationship between film reaction force in a single hvdrostatic pad and form errors of a guide rail is derived at various spacial frequencies by FEM analysis, and it is expressed as a transfer function. This transfer function clarifies so called averaging effect of the oil film quantitatively. For erample, it is found that the amplitude of the film reaction force is reduced as the spacial frequency increases or relative width of the pocket is decreased. Furthermore, the transfer function is utilized to estimate motion errors of a multiple pad table from form errors of a guide rail, and also to estimate form errors from motion errors. A new method is proposed by which the motion accuracy of the table is improved by lapping the rail surface so as to eliminate the estimated form errors, and its validity is verified analytically in the present research.
公益社団法人精密工学会の論文
2000-12-05