Walking Driveに基づくXYθテーブルの開発(第1報) : 既定変位パターン駆動方式の提案と検証

概要

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A new method to drive an ultraprecision XYθtable is developed by utilizing piezoelectric actuators, Which is based on the principle of 'Walking Drive'. The table is supported and driven directly by nine pairs of the feed and support actuators. The device does not require any conventional guides, and it is free from undesirable friction. Displacement patterns of the feed and support actuators are predetermined in the proposed method, and they are given to the actuators in real time in accordance with an arbitrary command path. A prototype ultraprecision XYθ table and a simple open loop controller are developed based on the method utilizing the predetermined displacement patterns. A 6-axis position measuring system is also developed with laser interferometers and capacitance type gap sensors. Driving experiments are carried out by utilizing the positioning and measuring systems, and the feasibility of the proposed method is verified experimentally.
公益社団法人精密工学会の論文
2001-06-05